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Nikon NEXIV VMF-K6561 Achieves Full 600 mm Panel Coverage

Eliminates production backlogs and shortens measurement times

Quality Digest
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Wed, 06/03/2026 - 12:02
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(Nikon Metrology: Brighton, MI) -- Nikon Metrology has launched the NEXIV VMF-K6561, the latest addition to its NEXIV 3D Confocal series.

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Building upon the proven technology of the NEXIV VMF-K series, the NEXIV VMF-K6561 features a 650 × 610 mm stage capable of measuring an entire large-format 600 × 600 mm panel in a single setup. This enables full-panel measurement of panel-level packages using Nikon’s high-speed measurement technology.

The full-panel measurement eliminates production backlogs and shortens measurement times. Furthermore, the larger stage features an increased stage glass thickness, ensuring stable measurements.

More information about the NEXIV VMF-K6561 can be found here.

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