(EV Group: St. Florian, Austria) -- EV Group, serving advanced and future semiconductor designs and chip integration schemes, has unveiled its EVG120 automated resist processing system—a major update to one of the company’s leading coater/developer platforms.

Incorporating a new compact architecture, breakthrough capabilities, and design enhancements leveraged from the widely adopted EVG150 system, the new EVG120 delivers significantly higher throughput, greater flexibility, and improved process control compared to the previous generation. It does this in a smaller footprint optimized for customers with a high mix of products and resist processes that demand maximum flexibility.

 …