(Rigaku: Tokyo) -- Rigaku Corp., a global solution partner in X-ray metrology systems and a group company of Rigaku Holdings Corp., has launched commercial production of XTRAIA XD-3300, a high-resolution microspot X-ray diffraction system

Against a background of demand for generative AI and data centers, scaling and 3D realization of semiconductors are advancing at unprecedented speed. Needs are growing for next-generation memory such as high-bandwidth memory (HBM) and 3D DRAM as well as 2 nm and subsequent generations of logic semiconductors. To secure high performance in these devices, chipmakers are adopting superlattices (nanoscale integrated structures) using Si/SiGe (silicon/silicon-germanium) processes. To control these advanced internal structures appropriately, measurement technology that can accurately assess the composition and thickness of Si/SiGe films is indispensable; it holds the key to improving product performance and yield.

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