(Physik Instrumente: Shrewsbury, MA) -- For high-precision applications that don’t require the ultimate geometric performance of air bearings, the Physik Instrumente (PI) new V-700 series of mechanical-bearing XY stages provides an attractive alternative.

The V-783 high-precision linear motion stage combines long travel, nanometer-level positioning performance, and smooth high-speed scanning in a compact design. Designed and manufactured in the U.S., it features a large 360 × 360 mm open aperture and is optimized for semiconductor inspection, photonics alignment, metrology, imaging, laser microprocessing, biotechnology, microscopy, precision assembly, and advanced automation systems.

The V-783 precision positioning system offers 310 × 310 mm travel (12.2 × 12.2 in.) in a rigid monolithic XY configuration that delivers greater stiffness and a lower profile than conventional stacked-stage designs based on two individual axes. The large open aperture supports transmissive-light applications, while direct-drive brushless ironless linear motors eliminate backlash and mechanical drivetrain effects for smooth, highly repeatable motion.

Key specifications

• ±0.07 µm bidirectional repeatability and ±0.17 µm positioning accuracy
• 1 nm encoder resolution with incremental or absolute encoder options
• Velocity to 1 m/s and acceleration to 10 m/s²
• Straightness and flatness to 0.75 µm
• 310 × 310 mm (12.2 × 12.2 in.) travel, ideal for 300 mm wafer applications
• 360 × 360 mm open aperture for transmitted-light and inspection systems
• Monolithic XY design with load capacity up to 50 kg
• An optional absolute encoder provides immediate position feedback after power-up, eliminating homing routines and reducing machine downtime.

Advanced motion controllers and software

With PI’s A-800 ACS-based motion controllers, the V-783 XY stage becomes part of a high-performance motion platform supporting synchronized multi-axis operation, EtherCAT networking, advanced servo algorithms, and automation-ready system integration. The motion controller is supported by a comprehensive software suite for users and programmers.

Combining direct-drive performance, nanometer-resolution feedback, high geometric accuracy, long travel, and a large aperture in a compact package, the V-783 XY system provides OEMs and system builders with a robust positioning solution for precision inspection, manufacturing, and automation applications.

Industries served and applications

Semiconductor manufacturing, photonics alignment, optical and wafer inspection, flat-panel display inspection, metrology, microscopy, laser processing, precision assembly, and industrial automation.

Watch the video, download the XY-stage datasheet.

PI’s new linear-motor driven XY stage with large aperture, >12 in. x 12 in. travel, and nanometer resolution is designed and manufactured in the U.S.