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Mahr Introduces MarSurf3D MS Optical Metrology Platform With Multisensor Technology

Combines three powerful 3D surface measurement technologies in single, high-performance system

Quality Digest
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Thu, 07/16/2026 - 12:03
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(Mahr: Providence, RI) -- Mahr Inc., a leading provider of dimensional metrology solutions, announced the launch of its MarSurf3D MS optical metrology platform, featuring a multisensor measuring head designed to deliver flexibility and modularity with precision.

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The new 3D optical platform enables manufacturers to easily customize and configure a single measurement system that meets their specific application requirements, eliminating the need to switch between instruments.

The MarSurf3D MS is capable of real-time measurements down to the subnanometer range with a flexible multisensor measuring head that combines three distinct area-based measuring technologies.

LED confocal: The patented multi-pinhole technology ensures ultrafast image capture with the highest signal quality, delivering maximum repeatability down to the nanometer range on nearly any surface condition.

White light interferometry: Offers vertical resolution in the subnanometer range regardless of magnification, making it ideal for measurement of ultraprecise step heights and very low roughness surfaces.

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