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AcuityXR Technology Breaks Diffraction Limit

ContourGT optical surface profilers can now deliver unprecedented lateral resolution

Bruker Corp.
Tue, 11/30/2010 - 13:24
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(Bruker Corp.: Boston) -- At the Materials Research Society (MRS) Fall 2010 meeting taking place Nov. 29–Dec.3, Bruker Corp. has unveiled the AcuityXR, an optical surface profiler that combines patent-pending Bruker hardware and software technology to enable select ContourGT noncontact, 3-D optical surface profilers to deliver lateral resolutions previously considered impossible to achieve.

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Many nanoscale applications in the semiconductor, medical, and precision machining fields have surface features and defects with dimensions that limit detection or identification due to the optical diffraction limit. Such miniscule features and defects often directly affect function, performance, quality, or manufacturing yields and are of great interest to researchers and quality assurance personnel.

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