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New XYZ-Tip-Tilt Air Bearing Stage From PI

5-DOF motion designed for semiconductor, optics, and photonics applications

Quality Digest
Wed, 08/26/2026 - 12:03
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(Physik Instrumente: Shrewsbury, MA) -- Physik Instrumente (PI) has introduced the A-725, a five-axis air bearing nanopositioning system that pairs a true planar XY stage with an integrated parallel-kinematics Z-θX-θY module.

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Designed and built in the U.S., PI’s 5-DOF stage targets semiconductor manufacturing, photonics, metrology, microscopy, and precision automation, offering frictionless motion, high geometric accuracy, and precise multi-axis alignment in a compact package.

The A-725 is available in different configurations, with XY travel ranging from 100 × 100 mm to 300 × 400 mm, along with 5 mm of Z travel and ±2° of tip/tilt. With a 250 mm platform diameter and payload capacity up to 8 kg, it’s suited to demanding tasks like optical inspection, alignment, and laser dicing.


5-DOF air-bearing nanopositioning system for semiconductor alignment and metrology applications

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