(Physik Instrumente: Shrewsbury, MA) -- Physik Instrumente (PI) has introduced the A-725, a five-axis air bearing nanopositioning system that pairs a true planar XY stage with an integrated parallel-kinematics Z-θX-θY module.

Designed and built in the U.S., PI’s 5-DOF stage targets semiconductor manufacturing, photonics, metrology, microscopy, and precision automation, offering frictionless motion, high geometric accuracy, and precise multi-axis alignment in a compact package.

The A-725 is available in different configurations, with XY travel ranging from 100 × 100 mm to 300 × 400 mm, along with 5 mm of Z travel and ±2° of tip/tilt. With a 250 mm platform diameter and payload capacity up to 8 kg, it’s suited to demanding tasks like optical inspection, alignment, and laser dicing.

Low-profile planar XY base stage

The A-725 is built on PI’s A-311 planar air-bearing stage, where the platform moves across a single reference plane in both X and Y—unlike conventional stacked designs. This eliminates stacking errors and minimizes Abbe offsets, improving geometric accuracy over stacked or mechanical-bearing alternatives. Read this tech blog comparison on design types.

Parallel-kinematics Z-tip-tilt module

Mounted above the base stage, PI’s A-523 Z-θX-θY module delivers vertical and angular positioning while maintaining a low center of gravity.

Direct-drive, turnkey design—tuned and tested with EtherCat controller

Ironless three-phase linear motors drive all five axes, removing friction, backlash, cogging, and wear. Each system ships wired, tested, and servo-tuned with PI ACS-based controllers, reducing commissioning time. Learn more about air bearing applications.

Specifications, datasheet

5-Axis Air Bearing Stage

Video

Systems in Motion: Improving Wafer Inspection and Metrology With Air Bearings and Piezo Nanopositioning Stages

Applications and industries served

Semiconductor test and manufacture, wafer stealth slicing, optical metrology, photonics alignment, material research, and laser processing.