Carl Zeiss SMT AG has incorporated the electron beam technology business formerly marketed under the LEO brand.

LEO will become the new Nanotechnology Systems Division of Carl Zeiss SMT. LEO has been a wholly owned subsdiary of Carl Zeiss SMT AG since 2001. "With this step, we’re accomplishing the complete integration of electon beam technology into the Carl Zeiss SMT portfolio," says Dirk Stenkamp, CEO of the LEO group. "We expect many different synergies. The innovative power of electron beam techology will receive a clear boost under the aegis of SMT and will simultaneously benefit from the worldwide image provided by the Carl Zeiss brand."

Carl Zeiss SMT is already one of the global market leaders in the manufacture of light optical systems for semiconductor production. The integration of electron beam technology adds a range of applications in the field of semiconductor manufacture. One of the first applications is the repair of photo masks for semiconductor lithography.

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