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A Primary Standard for Measuring Vacuum

Tracking changes in fluorescence from ultracold atoms is a super-sensitive indicator of pressure

NIST
Thu, 08/18/2022 - 12:02
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A novel, quantum-based vacuum gauge system invented by researchers at the National Institute of Standards and Technology (NIST) has passed its first test to be a true primary standard—that is, intrinsically accurate without the need for calibration.

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Precision pressure measurement is of urgent interest to semiconductor fabricators that make their chips layer by layer in vacuum chambers operating at or below one hundred-billionth the pressure of air at sea level. They must rigorously control that environment to ensure product quality.


NIST scientist Stephen Eckel behind a pCAVS unit (silver-colored cube left of center) that is connected to a vacuum chamber (cylinder at right). Credit: C. Suplee/NIST

“The next generations of semiconductor manufacturing, quantum technologies, and particle acceleration-type experiments will all require exquisite vacuum and the ability to measure it accurately,” says NIST senior project scientist Stephen Eckel.

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