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Product News: MRSI Dispense Systems Now Available with Confocal Height Sensor

Sensor allows accurate measurement of glass, semiconductor materials, and mirrored surfaces

Newport Corp.
Fri, 10/08/2010 - 12:41
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(Newport Corp.: Irvine, CA) -- Newport Corp. a global provider of laser and photonic solutions, has released the Confocal Height Sensor for use with the company’s MRSI Dispense Systems. The chromatic confocal sensor allows measurements in a single axis, providing access to deep cavities, confined spaces, and areas that are in close proximity to walls and other obstructions. This measuring tool is ideal for radio frequency and microwave packages, which have been difficult to measure using traditional, reflective-laser height-sensing techniques.

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An LED light source with a sensor spot size of 50 microns in diameter is utilized to provide nanoresolution that is nearly target-independent. The confocal sensor allows accurate measurement of glass, semiconductor materials, and mirrored surfaces. It can be used to precisely determine dispense heights for three of Newport’s legacy products, the MRSI-175Ag, the MRSI-605, and the MRSI M-5. The MRSI dispense systems provide advanced-assembly solutions for complete epoxy die attach, eutectic, and flip-chip bonding. It delivers turnkey production for MEMS, multichip modules, semiconductor packaging, microwave modules, flip chip, and photonics packaging.

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