(4D Technology Corp.: Tucson, AZ) -- Extended precision metrology is critical for controlling optics-polishing methods such as ion-beam etching and magnetorheological finishing (MRF). These methods can create features with higher spatial frequency than traditional polishing methods; therefore, the measurement system to verify the polishing must also have higher precision in these frequencies. The Extended Precision Package (EPP) option for the PhaseCam 6000 laser interferometer meets this challenge by extending precision by more than 4X in this critical spatial range.

The PhaseCam 6000 is a compact and lightweight laser interferometer that utilizes Dynamic Interferometry to make high-speed surface measurements despite vibration or air turbulence. With a fiber-coupled measurement head and motorized controls, the PhaseCam 6000 is ideal for use in on-machine measurement and other challenging environments. Applications include feedback for polishing of large focal optics, verification of optical systems such as concave telescope mirrors and lens systems, and measurement of moving components such as deformable mirrors and adaptive optics.

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