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Product News: Nikon’s Eclipse L300N/L300ND Widens Inspection Capability

Enhanced epi-fluorescence improves observation performance and operation

Nikon Metrology Inc.
Wed, 07/14/2010 - 05:30
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(Nikon Metrology: Brighton, MI) -- Nikon Metrology Inc. introduces the Eclipse L300N/L300ND, an FPD/LSI inspection microscope with an enhanced epi-fluorescence function enabling 365 nm UV excitation, optimal for inspecting semiconductor resist residues on 300 mm wafers and organic electroluminescence displays (OLEDs). The system also incorporates Nikon’s CFI60 infinity optics, offering both image brightness through high NA and wider sample range and access, along with long working distance.

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The motorized universal nosepiece on the Eclipse L300/L300N is three times more durable than conventional models. It incorporates an antiflash mechanism, which engages when the nosepiece is rotated, to protect the operator’s eye. In addition, a centering mechanism is possible at three nosepiece positions to minimize image shifts when changing the objective magnification. The USB interface is available for nosepiece position output to DS-L2 and U2 as well as control of the nosepiece through Nikon’s NIS-Elements software.

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