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DektakXT Stylus Profiler Offers 40% Faster Scan Performance

Bruker’s tenth-generation system measures nanometer-scale film thickness and surface-textures

Bruker Corp.
Tue, 03/22/2011 - 11:27
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(Bruker AXS: Tucson, AZ) -- Bruker has created the DektakXT, a new stylus profiler that is the first production system with sustained repeatability of less than five angstroms. This major milestone in stylus-profiler surface metrology performance is the culmination of Dektak’s 40-year legacy of innovation.

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The tenth-generation of Dektak systems, DektakXT features a number of other firsts in stylus profiler history, including a “single arch” design with enhanced metrology features; a 64-bit, parallel processing software architecture (Bruker’s powerful and intuitive Vision64 operating and analysis software); and the first true-color, HD-resolution camera. Together, these capabilities enable DektakXT to deliver industry-leading nanometer-scale film thickness and surface-texture measurements with improved gauge repeatability and up to 40-percent faster scan performance. DektakXT provides optimal results for a wide range of metrology applications where the combination of repeatable nanoscale measurements, throughput, and low total cost of ownership is essential.

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