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Published: Wednesday, September 13, 2006 - 22:00 The companies will investigate the use of X-ray metrology in the process control of new semiconductor materials used at the 45 nm technology node and below, using Bede’s BedeMetrix-L and Microsource with ScribeView optics X-ray system. The BedeMetrix-L uses a combination of high-resolution X-ray diffraction, X-ray diffraction and X-ray reflectivity techniques on a single platform for a wide range of front- and back-end process control applications. X-ray metrology is an important technology for controlling semiconductor processes as the technology nodes shrink, especially at 45 nm and below. “Bede X-ray Metrology will be used for the measurement of critical process control parameters needed in the use of advanced semiconductor materials for device fabrication,” says Luc Van den hove, IMEC silicon process and device technology vice president. “We are pleased that our research will benefit from Bede’s expertise in X-ray-based process metrology.” For more information, visit www.bede.co.uk/index.jsp?content=06aug25.jsp or www.imec.be. Quality Digest does not charge readers for its content. We believe that industry news is important for you to do your job, and Quality Digest supports businesses of all types. However, someone has to pay for this content. And that’s where advertising comes in. Most people consider ads a nuisance, but they do serve a useful function besides allowing media companies to stay afloat. They keep you aware of new products and services relevant to your industry. All ads in Quality Digest apply directly to products and services that most of our readers need. You won’t see automobile or health supplement ads. So please consider turning off your ad blocker for our site. Thanks, For 39 years Quality Digest has been the go-to source for all things quality. Our newsletter, Quality Digest, shares expert commentary and relevant industry resources to assist our readers in their quest for continuous improvement. Our website includes every column and article from the newsletter since May 2009 as well as back issues of Quality Digest magazine to August 1995. We are committed to promoting a view wherein quality is not a niche, but an integral part of every phase of manufacturing and services.Bede X-ray Metrology Partners with Belgian Research Center
Bede X-ray Metrology, a provider of X-ray metrology solutions to the semiconductor industry, has announced a collaboration with IMEC, a Belgian nanoelectronics and nanotechnology research center.
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