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imec Receives World’s Most Advanced High NA EUV System

Major milestone propelling industry into angstrom era

Quality Digest
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Wed, 04/08/2026 - 14:02
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(imec: Leuven, Belgium) -- imec, a world-leading research and innovation hub in advanced semiconductor technologies, has announced the arrival of the ASML EXE:5200 High NA EUV lithography system, the most advanced lithography tool available today.

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With this strategic milestone, imec reinforces its position as the industry’s launchpad into the angstrom era, giving its global partners’ ecosystem early access to the next generation of chip-scaling technologies. Integrated directly with a comprehensive suite of patterning and metrology tools and materials, the High NA EUV system empowers imec and its ecosystem partners to unlock the performance needed to pioneer sub-2 nm logic and high-density memory technologies that will fuel the rapid growth of advanced AI and high-performance computing.

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