(Physik Instrumente: Auburn, MA) -- Physik Instrumente (PI), a leader in precision motion control, introduces the A-361 air-bearing XY-rotation stage, a compact nanopositioning platform engineered for ultrahigh precision and stability in demanding research and industrial applications.

The A-361 XY-rotation stage combines an exceptionally low profile of just 39.5 mm with a generous 200 mm-diameter motion platform. It provides translational motion of 5 mm in both the X and Y directions, along with rotational motion of 2° around the Z axis.

High resolution and precision

Performance specifications underscore the stage’s suitability for the most demanding environments. Minimum incremental motion is less than 30 nm for linear axes, and below 0.5 µrad for rotation, with calibrated positioning accuracy of ±0.2 µm in XY and ±5 µrad in θZ. Bidirectional repeatability reaches 0.2 µm in XY, and 4 µrad rotationally.

Applications

The A-361 PI glide XY-theta stage is particularly well suited for wafer inspection, flat-panel display metrology, fiber and optics alignment, maskless lithography, and µLED manufacturing. Its clean, noncontact design, combined with ultrahigh stability and resolution, make it a compelling solution for semiconductor and photonics production environments.

Frictionless bearing design, lock-down mechanism for ultrahigh stability

With its frictionless air bearings and noncontact motors, the A-361 ensures smooth motion without wear, enabling virtually maintenance-free operation and a service life measured in decades. Integrated position-locking further enhances stability, eliminating servo jitter in critical measurement and alignment tasks. A built-in vacuum chuck accommodates wafers or other delicate substrates, making the stage well suited for semiconductor and optics applications.

Frictionless direct drives, high dynamics

Voice-coil direct drives provide frictionless, highly dynamic response, generating up to 6 N of continuous force and 19.2 N peak. Despite its compact footprint, the A-361 supports payloads up to 3 kg, and its lightweight design with hard-anodized aluminum construction ensures stability and durability.

Designed for cleanroom operation, the A-361 requires only dry, oil-free compressed air in accordance with ISO 8573-1 purity standards. Air consumption is limited to 28 L/min, making the system highly efficient for continuous operation. When combined with the A-523 Z Tip/Tilt Stage, the A-361 forms the basis of a versatile six-degrees-of-freedom nanopositioning stack, enabling complete spatial control for precision alignment tasks in photonics, optics, and microassembly. Complementing the platform, PI provides integrated accessories such as air-preparation kits, multiaxis controllers, and custom cabling solutions, ensuring seamless system integration and enhanced performance.

Industries served:
• Semiconductor test and wafer inspection
• Photonics and fiber alignment
• Precision optics alignment
• Flat panel inspection
• Maskless lithography
• Advanced LED manufacturing
• Tribology
• Material research

Learn more about the A-361 low-profile XY-rotation air-bearing nanopositioning stage here.

Ultralow-profile 3-axis nanopositioning stage