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PI’s Ultralow Profile XY-Theta Nanopositioning Stage Uses Air Bearings

Unique and compact three-axis precision motion platform

Quality Digest
Tue, 05/21/2024 - 12:00
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(PI Americas: Auburn, MA) -- PI, a global leader in precision motion control and nanopositioning products, has released a unique planar XY-Theta-Z nanopositioning stage based on air bearings and direct drive motors.

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Unlike conventional multi-axis stages, the A-361 employs only one moving platform shared among all three axes. One of its advantages is the ultralow profile of only 40 mm, despite featuring an integrated vacuum chuck to accommodate wafers or other samples. Engineered as a parallel-kinematic multi-axis system, this stage delivers exceptional precision in a remarkably compact package.

Noncontact, maintenance-free

By incorporating noncontact components, it ensures frictionless operation, offering not only ultrahigh precision but also superior performance and a completely maintenance-free, virtually infinite service life. The built-in position-locking capability proves useful for operations requiring utmost stability with zero servo jitter.

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