{domain:"www.qualitydigest.com",server:"169.47.211.87"} Skip to main content

User account menu
Main navigation
  • Topics
    • Customer Care
    • FDA Compliance
    • Healthcare
    • Innovation
    • Lean
    • Management
    • Metrology
    • Operations
    • Risk Management
    • Six Sigma
    • Standards
    • Statistics
    • Supply Chain
    • Sustainability
    • Training
  • Videos/Webinars
    • All videos
    • Product Demos
    • Webinars
  • Advertise
    • Advertise
    • Submit B2B Press Release
    • Write for us
  • Metrology Hub
  • Training
  • Subscribe
  • Log in
Mobile Menu
  • Home
  • Topics
    • 3D Metrology-CMSC
    • Customer Care
    • FDA Compliance
    • Healthcare
    • Innovation
    • Lean
    • Management
    • Metrology
    • Operations
    • Risk Management
    • Six Sigma
    • Standards
    • Statistics
    • Supply Chain
    • Sustainability
    • Training
  • Login / Subscribe
  • More...
    • All Features
    • All News
    • All Videos
    • Contact
    • Training

NIST ‘Hybrid Metrology’ Method Could Improve Computer Chips

Scientists have devised a precise, less expensive method of measuring what sits on a chip

NIST
Wed, 09/12/2012 - 14:20
  • Comment
  • RSS

Social Sharing block

  • Print
Body

A refined method developed at the National Institute of Standards and Technology (NIST) for measuring nanometer-sized objects may help computer manufacturers more effectively size up the myriad tiny switches packed onto chips’ surfaces. The method, which makes use of multiple measuring instruments and statistical techniques, is already drawing attention from industry.

ADVERTISEMENT

Nothing in life may be certain except death and taxes, but in the world of computer chip manufacturing, uncertainty is a particularly nagging issue, especially when measuring features smaller than a few dozen nanometers. Precision and accuracy are essential to controlling a complex and expensive manufacturing process to ensure the final chips actually work. But features on modern chips are so tiny that optical microscopes cannot make them out directly. Metrologists have to use indirect methods, like “scatterometry”—deducing their shape from sampling the pattern light created as it scatters off the features’ edges. When this isn’t enough, there’s atomic force microscopy (AFM). It's expensive and slow, but it can give distinct measurements of the height and width of a nanoscale object while light scattering occasionally has trouble distinguishing between them.

 …

Want to continue?
Log in or create a FREE account.
Enter your username or email address
Enter the password that accompanies your username.
By logging in you agree to receive communication from Quality Digest. Privacy Policy.
Create a FREE account
Forgot My Password

Add new comment

Image CAPTCHA
Enter the characters shown in the image.
Please login to comment.
      

© 2025 Quality Digest. Copyright on content held by Quality Digest or by individual authors. Contact Quality Digest for reprint information.
“Quality Digest" is a trademark owned by Quality Circle Institute Inc.

footer
  • Home
  • Print QD: 1995-2008
  • Print QD: 2008-2009
  • Videos
  • Privacy Policy
  • Write for us
footer second menu
  • Subscribe to Quality Digest
  • About Us
  • Contact Us