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Carl Zeiss Microscopy

Metrology

Product News: Carl Zeiss Releases LIBRA 200 CS-TEM/STEM

Corrections for spherical aberrations of objective lens and for the condenser system

Published: Monday, August 24, 2009 - 15:28

(Carl Zeiss: Oberkochen, Germany) -- Carl Zeiss, a leading global provider of electron- and ion-beam imaging and analysis solutions, presents its newly developed line of corrected LIBRA 200 transmission electron microscopes (TEM).

Two different configurations are offered.

 
Aberration free high resolution imaging of a YAG crystal interface at 200 kV.
[Courtesy of Katharina Hartmann, GFZ German Research Center for Geoscienes, Potsdam.]

The LIBRA 200 CS-TEM is based on the energy-filter version of the 200 kV LIBRA TEM with a corrector for spherical aberrations of the objective lens. By use of this corrector, image resolution below 0.7 angstrom (Å) can be achieved. Many applications will benefit from this development, e.g., imaging of interfaces in semiconductors or solar cells, grain boundaries in steel alloys, or damage induced by nuclear radiation in shielding materials. In all these application fields the control of the material at the atomic scale is necessary for in-depth understanding of the underlying physical or chemical processes and to guarantee the functionality of the devices. Another advantage based on the CS corrector is the ability to reduce the acceleration voltage down to 80 kV and still achieve resolutions below 1 Å. Beam damage can thus be reduced and sensitive materials like carbon nanotubes can be analyzed.

The LIBRA 200 CS-STEM with a corrector for the condenser system is used for imaging in the scanning mode with a resolution far below 1 Â and extreme high-resolution chemical analysis of samples, especially by means of electron energy loss spectroscopy (EELS). The corrected condenser allows minimizing the probe size below 1 Å, and at the same time increases intensity. Additionally the unique monochromator reduces the energy spread down to 0.15 eV. Basic research in materials science (e.g., chemical analysis of nanoparticles) especially will benefit from the resulting energy resolution that otherwise can only be reached at synchrotron rings.

“We have already started installation of several systems at customer sites in leading research facilities worldwide. Here resolution of 0.66 Å could be demonstrated. Customer feedback is extremely positive,” explains Thomas Albrecht, head of product management at Carl Zeiss SMT Nano Technology Systems Division. “We do have a lot of experience with corrected transmission electron microscopes from customer specific installations like the CRISP system at the Caesar—Center for Advanced European Studies and Research in Bonn. Now we are using this experience to broadly offer this superb technology to the market. This strategy is in line with our mission “Maximum Information—Maximum Insight.”

Correctors are developed and produced by the Heidelberg-based company CEOS GmbH, a specialist for electron optical correctors and a long-term partner for Carl Zeiss.

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Carl Zeiss Microscopy

Carl Zeiss Microscopy LLC (www.zeiss.com/micro) offers microscopy solutions and systems for research, routine, and industrial applications. In addition, Carl Zeiss Microscopy markets microscopy systems for the clinical market, as well as optical sensor systems for industrial and pharmaceutical applications. Since 1846, Carl Zeiss has remained committed to enabling science and technology to go beyond what man can see. Carl Zeiss is a global leader in the optical and opto-electronic industries. With offices in more than 30 countries, Carl Zeiss is represented in more than 100 countries with production centers in Europe, North America, Central America, and Asia.