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Cameca Announces Collaboration With University of Sydney

University acquires the Invizo 6000 atom probe tomography (APT) instrument

Published: Wednesday, January 19, 2022 - 13:00

(CAMECA: Madison, WI) -- CAMECA, a business unit of AMETEK Inc., and a world-leading supplier of microanalytical and metrology instrumentation for research and process control, is partnering with the University of Sydney on the acquisition of the latest atom probe tomography (APT) instrument—the Invizo 6000.

The Invizo 6000 introduces breakthrough technologies, which include a patented electrostatic design that enables simultaneous increased field of view and enhanced mass resolving power, a deep UV laser to promote enhanced ion emission, advanced dual-beam delivery optics which improve specimen symmetry, and a new extraction electrode design. These new features combine to provide increased data quality and analysis volumes, enhanced specimen yield, and dramatically expand the analytical capabilities of the APT method.

“The local electrode atom probe is an essential tool for our research community,” says Julie Cairney, professor of materials characterization at the University of Sydney. “For many years now, the older models of this instrument have been among our most heavily-used instruments. We use the atom probe for a wide range of applications, from improved additive manufacturing to efficient catalysis, and from new photovoltaics through to Martian meteorites. We are looking forward to working with CAMECA to demonstrate the benefits of the increased field of view and mass resolving power offered by the Invizo 6000.”

CAMECA teams are looking forward to working closely with the University of Sydney in demonstrating the advantages the Invizo 6000 provides across a broad range of key material science challenges.

“Since developing the revolutionary local electrode atom probe nearly two decades ago, CAMECA has remained at the forefront of atom probe instrument design,” says Jesse D. Olson, CAMECA’s business unit manager. “We are excited to partner with one of the leading academic research institutions in the world, the University of Sydney, who has been a CAMECA APT customer for more than 15 years, to explore the capabilities our newest APT product.”

Developed at the Atom Probe Technology Center in Madison, Wisconsin, the Invizo 6000 continues to advance CAMECA’s position as the world leader in atom probe tomography.

About the University of Sydney

The Australian Centre for Microscopy and Microanalysis is a research center at the University of Sydney driving innovation in science and engineering through microscopy and microanalysis. The center’s researchers explore physical and biological structures at the micro, nano, and atomic scales. A long-running research theme for the center has been on methodological advances in atom probe microscopy including specimen preparation techniques, the physical and digital workflows including cryo-techniques, and the tomographic reconstruction and quantitative analyses of the data. The Invizo 6000 will support the next chapter of this research.

The instrument will be operated by Sydney Microscopy & Microanalysis—a core research facility of the University of Sydney. This research facility operates a wide range of world-class microscopy capabilities, serving as an Australian national facility, and headquartering the national collaborative joint venture, Microscopy Australia. This means that the facilities are open to all Australian researchers, no matter where they are based, or whether they come from a research institution or from industry. The atom probe facilities are a flagship of this program at Sydney and are utilized by a diverse range of researchers across many different fields of research. The Invizo 6000 will deliver cutting-edge atom probe capability for all Australian researchers.


From its inception in 1929, CAMECA has been renowned for its precision mechanics, optics, and electronics. The company started in France as a manufacturer of movie theater projectors, before rapidly evolving into a provider of scientific instrumentation for the international research community and in-fab/near-fab metrology solutions for the semiconductor manufacturing industry. Located at its headquarters near Paris, France, as well as at the Atom Probe Technology Center in Madison, Wisconsin, the plants are state of the art facilities, using the best practices for clean room production, computer networking, electron and ion optics simulation, and advanced CAD. CAMECA has sales and service locations in Brazil, China, Germany, India, Japan, Korea, Taiwan, the United States, and a wide network of agents, ensuring the best level of support to all users. CAMECA’s mission is to focus on instrumental development to offer its customers the highest analytical performance in their specialized characterization fields. CAMECA is a business unit of AMETEK Inc., a leading global provider of electronic instruments and electromechanical devices with annualized sales of approximately $5.5 billion.


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