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Accurate Micropart Topography Using 3-D Metrology

Nanovea ST400 is used to measure the features of a plastic nozzle plate

Thu, 12/02/2010 - 15:29
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icromachining and micromolding are fabrication technologies used for developing devices and components at the micro-to-macro scale. To provide quality control at this scale, manufacturers must be able to inspect various surface measurements, including roughness, area, and dimension. Surface measurement is a crucial step during the microfabrication process, even before production in large quantities begins. Precise measurement and evaluation of a surface can lead to the best selection of process and control measures.

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Micropart topography is vital to understanding and controlling a component’s use. The technique relies on quantifiable, reproducible, and reliable measurements of a part’s surface topography and dimension. For this process, the Nanovea 3-D noncontact profilometer is ideal. With its chromatic confocal technology, the profilometer can provide reliable data regardless of surface variation, angle, and reflectivity.

In this application, the Nanovea ST400 is used to measure the features of a plastic nozzle plate (figure 1). Several surface parameters can automatically be calculated, including average surface roughness, step height, area, and many.

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